JPH0743604Y2 - 圧電素子微小位置決め機構 - Google Patents

圧電素子微小位置決め機構

Info

Publication number
JPH0743604Y2
JPH0743604Y2 JP1987152538U JP15253887U JPH0743604Y2 JP H0743604 Y2 JPH0743604 Y2 JP H0743604Y2 JP 1987152538 U JP1987152538 U JP 1987152538U JP 15253887 U JP15253887 U JP 15253887U JP H0743604 Y2 JPH0743604 Y2 JP H0743604Y2
Authority
JP
Japan
Prior art keywords
piezoelectric element
element body
detection probe
electrode
positioning mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987152538U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0180754U (en]
Inventor
寛 阪東
洋志 徳本
文樹 坂井
千加良 宮田
茂 脇山
Original Assignee
工業技術院長
セイコー電子工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 工業技術院長, セイコー電子工業株式会社 filed Critical 工業技術院長
Priority to JP1987152538U priority Critical patent/JPH0743604Y2/ja
Publication of JPH0180754U publication Critical patent/JPH0180754U/ja
Application granted granted Critical
Publication of JPH0743604Y2 publication Critical patent/JPH0743604Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP1987152538U 1987-10-05 1987-10-05 圧電素子微小位置決め機構 Expired - Lifetime JPH0743604Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987152538U JPH0743604Y2 (ja) 1987-10-05 1987-10-05 圧電素子微小位置決め機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987152538U JPH0743604Y2 (ja) 1987-10-05 1987-10-05 圧電素子微小位置決め機構

Publications (2)

Publication Number Publication Date
JPH0180754U JPH0180754U (en]) 1989-05-30
JPH0743604Y2 true JPH0743604Y2 (ja) 1995-10-09

Family

ID=31427557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987152538U Expired - Lifetime JPH0743604Y2 (ja) 1987-10-05 1987-10-05 圧電素子微小位置決め機構

Country Status (1)

Country Link
JP (1) JPH0743604Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62117379A (ja) * 1985-11-16 1987-05-28 Tohoku Metal Ind Ltd 円筒型圧電アクチユエ−タ及びその製造方法

Also Published As

Publication number Publication date
JPH0180754U (en]) 1989-05-30

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